MOSFET ON resistance

MOSFET characteristic examples (Reference)

(Shindengen Electric Manufacturing Co., Ltd. products)

Type No.

VDSS

ID

RDS(ON)

P60B6SN

60V

60A

5.3mΩ

P4B60HP2

600V

4A

1.5Ω

This is a comparison of the RDS(ON) of a low VDSS MOSFET and
high VDSS MOSFET using the same package.
The size of the bare dies is nearly the same, but there is this much of a difference in RDS(ON).

Diode characteristic examples (Reference)

(Shindengen Electric Manufacturing Co., Ltd. products)

Type No.

VRRM

IF

VF

D1FS6A (SBD)

60V

2.6A

0.57V

D1F60A (General Di)

600V

1.2A

0.97V

Diode VF does not rely on VRRM as much as MOSFET RDS(ON).

What is ON resistance?

ON resistance (RDS (ON)) refers to the resistance from the D terminal to the S terminal which includes the channel resistance as well as other N layer resistance and wire and lead frame resistance, etc.

  1. Wire and lead frame resistance from the S terminal to the S electrode
  2. Channel resistance
  3. Drift resistance
  4. Silicon substrate  resistance
  5. Solder and lead frame resistance from the electrode on the back of the bare die to the D terminal

RDS(ON) details

  1. Wire and lead frame resistance from the S terminal to the S electrode
  2. Channel resistance
  3. Drift resistance
    ⇒This varies greatly between high and low VDSS
  4. Silicon substrate resistance
  5. Solder and lead frame resistance from the back of the bare die to the D terminal

Differences in drift layer between high and low VDSS MOSFETs

If voltage is applied between D-S, a depletion layer will extend to the N-layer based on the voltage.
The MOSFET VDSS is determined by the size (thickness) of the depletion layer on the N-layer.

High VDSS MOSFET

Low VDSS MOSFET

The MOSFET is designed so that the depletion layer can expand easily, so the N-layer (drift layer) is thick, and the impurity concentration is low.
⇒Resistance value is high when wanting to pass current through

The depletion layer only needs to extend a slight amount, so the N-layer (drift layer) is thin and the impurity concentration is high.
⇒Resistance value is low when wanting to pass current through

From this you can see that there is a “minimum resistance value” based on the required VDSS.

In order to lower RDS(ON)

  1. Manufacture a single bare die with a large number of clustered  cells
    ⇒This is the basic methodology, however concentrating a large number of clustered cells will increase the bare die size and also increase the cost.
  2. Make each cell as small as possible
    ⇒If channel length is shortened, the channel resistance per each individual cell will decrease, allowing for a higher concentration of cells on the same bare die area.
  3. Utilize cell layout orientation
    ⇒This is what the trench technique consists of.  Requires specialized processing for etching trenches.
  4. Lower the resistance of components other than the channel
    ⇒A variety of techniques are utilized to lower resistance including lowering the resistance of the drift layer which increases VDSS, using connectors instead of wires, increasing lead frame and terminal thickness, etc.

Major technologies for lowering RDS(ON)

Degree of effectiveness

Details and aims

Low withstand voltage MOSFETs

High withstand voltage MOSFETs

Process miniaturization

The fundamental semiconductor processing technique. Equipment capacity.
Reduces channel resistance and miniaturizes cells.

Trench gates

Technology where trenches are etches and gates are embedded.
The main technique for low VDSS MOSFETs. Increases cell density.

Clips (connectors)

Metallic conductors are used for connections instead of wires.
Lowers not only resistance, but also inductance. 

Super Junction

PN stripe structures are created on the drift layer.
Lowers RDS(ON) below previous theoretical limitations.

Wide Band Gap

Introduction of new materials such as SiC and GaN.
Allows for characteristics which were not achievable with Si.

Super Junction and Wide Band Gap are technologies for lowering drift layer resistance which are used in high VDSS MOSFETs.

Effects of RDS(ON) and capacitive components on circuit characteristics

Large bare die size

Ron - Low
Capacity - High
Price - High

Small bare die size

Ron - High (4 times)
Capacity - Low (1/4)
Price - Low

The larger the bare die size, the smaller the RDS(ON) will be, however capacity will also increase by the same amount, so there will be high power loss from switching, drive, etc.
If cost is ignored, the dashed line in the Fig.1 is the optimal performance. Simply having the lowest RDS(ON) is not optimal.

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